Evaporation is a powerful technique for thick metal or organic coatings. It is a vapor phase deposition technique and requires good vacuum. High temperatures must be reached to vaporize the material under vacuum to coat the substrate. Typically any material where evaporation temperature is less than 2000 ⁰C can be evaporated at about 10^-5 Torr for coating. However, appropriate crucibles (Alumina, Quartz, Boron Nitride etc) with proper baskets or boats must be chosen. Organic materials require lower temperatures (about 600⁰C) but better controlled.KiI提供飞行时间二次离子质谱仪,晶圆清洗机,磁控溅射镀膜机,离子束刻蚀机,原子层沉积设备等工艺系统全套解决方案和技术支持
Some materials have low sticking coefficient making it difficult to build a film or require substrate heating (optional) to control stoichiometry. These problems can be overcome by pressure and heating control. Having a computer-controlled system we can assure low background pressure is reached before evaporation can start. Especially at the beginning, impurities that outgas can be pumped down by heating the empty crucible or the boat.KiI提供飞行时间二次离子质谱仪,晶圆清洗机,磁控溅射镀膜机,离子束刻蚀机,原子层沉积设备等工艺系统全套解决方案和技术支持